Minerva
Works performs the best-known surface treatment methods
established by Shih Her Technologies for part cleaning
of PVD, CVD, Etch and Lithography systems.
The Surface
Treatment Processes include :
Chemical
Cleaning
Different
Recipe for parts base on individual base materials.
Mechanical
Cleaning
Arc
Spray (Metallization Coating)
Pressure
Bead Blasting
(a)
Metal parts (b) Ceramic (c) Quartz
Ultrasonic
Cleaning System
Customised
Cleaning Processes
Customized/
Co-work with customer to produce special cleaning
procedure according to requirements and
